Instrumentação de linha de produção de dispositivos sensores baseados em nanofitas semicondutoras

Abstract

This work describes the stages of the photolithography process of electronic devices to study their electrical properties. properties developed in a semiconductor physics research laboratory. The optimization and automation of a photosensitivity device used in photolithography techniques are described. Automation was done using an Arduino Uno microcontroller and servomotors. The project was tested with the aim of reducing failures due to operational errors and seeking to improve safety in the production of devices involving ultraviolet radiation.